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TAIPEI — ASML, the world’s largest semiconductor equipment maker, is already working to develop the next generation of cutting-edge lithography machines to serve the chip industry in the next decade, the company’s executive vice president of technology told Nikkei Asia.
Jos Benschop said the Netherlands-based company and its exclusive optics partner Carl Zeiss are studying designs for machines that could print circuits with a resolution as fine as 5 nanometers in a single exposure, adding that the technology would be advanced enough to serve the industry’s needs from 2035 and beyond.
